LOS ANGELES &#151 The three major scanner vendors announced plans for production-worthy 193-nm immersion tools here Tuesday (Jan. 27th) at the third Immersion Lithography Workshop, organized by ...

Nikon Corp said Thursday that the NSR-S621D ArF immersion scanner began shipping to IC manufacturers in January to deliver ultra-high productivity and superior overlay accuracy for the most demanding ...

Demonstrating significant progress in all aspects of the technology, 193nm immersion lithography is on track for insertion into volume manufacturing, with good prospects for extendibility to ...

TOKYO--(BUSINESS WIRE)--Nikon Corporation has announced release of the NSR-S622D ArF immersion scanner to deliver world-class overlay and ultra-high productivity for the most demanding multiple ...

After a year of seeing device manufacturers cutting capex quarter after quarter, the equipment makers are seeing the device guys doubling and tripling their capex budgets and swamping them with ...

TOKYO--(BUSINESS WIRE)--Nikon Corporation introduces the NSR-S631E ArF immersion scanner, ensuring world-class device patterning and optimum fab productivity to fully satisfy real-world 7 nm node ...

Exposure toolmaker Nikon said that it has shipped a production version of its immersion lithography scanner, the NSR-S609B. The tool shipped last month, and the Japanese supplier claimed it is the ...

Winbond Electronics recently took delivery of its first immersion lithography scanner, which is designed for 12-inch wafers at the 40nm-class node and beyond, according to a Chinese-language Economic ...

CHIBA, Japan, Dec 6 (Reuters) - Canon Inc <7751.T> expects global sales of dry ArF scanners to fall slightly next year, while sales of immersion scanners will grow as memory makers shift spending to ...

LOS ANGELES — The three major scanner vendors announced plans for production-worthy 193-nm immersion tools here Tuesday (Jan. 27th) at the third Immersion Lithography Workshop, organized by ...